/Postdoctoral Researcher in Etching of Aluminides for Advanced Nano-interconnects

Postdoctoral Researcher in Etching of Aluminides for Advanced Nano-interconnects

Research & development - Leuven | More than two weeks ago

As a postdoctoral researcher, you will develop a subtractive etch solution for aluminide binary metal alloys by overcoming fundamental etch challenges.

Postdoctoral Researcher in Etching of Aluminides for Advanced Nano-interconnects

What you will do

Nano-interconnects (IC) face multiple challenges, among which RC delay and therefore resistance scaling. Semiconductor industry is nowadays moving to pure ruthenium (Ru) as alternative current carrier metal, however, Ru itself is already facing limitations due to bridging formation and leakage at smaller pitch. Thus, binary metal alloys, based on Aluminum, are being explored right now as an alternative solution. You will be a part of Dry-Etch Team and the work will be performed in close collaboration with device and material scientists from IMEC, chemical and tool suppliers, partnering academics. Once the direct metal etch gets success, the study will then include the evaluation of nano-circuits allowing to extract electrical characteristics of the metal lines, such as line resistivity, leakage current, electromigration and dielectric breakdown performances, which will be benchmarked to conventional Cu damascene interconnects.

More specifically, you will

  • Explore, investigate, and validate novel approaches, including but not limited to focusing on plasma-based reactive ion etching (RIE) and exploring different reactions paths and options for etching metallic alloys using suitable gas combinations and cyclic processes applied to selected representative compounds.
  • Provide fundamental understanding on the physical and chemical processes that govern the etch mechanism of binary metal alloys on blanket substrates or patterned wafers. It is important to driving and understanding the interactions between the etch and other process steps.
  • Write papers, patents and extend your network.

Type of work: 75% experimental, 25% modeling (wherever required), 10% literature
Manager: Frederic Lazzarino
Mentor: Souvik Kundu
KU Leuven Promotor: Stefan De Gendt

What we do for you

We offer you the opportunity to join one of the world’s premier research centers in nanotechnology at its headquarters in Leuven, Belgium. With your talent, passion and expertise, you’ll become part of a team that makes the impossible possible. Together, we shape the technology that will determine the society of tomorrow.

We are committed to being an inclusive employer and proud of our open, multicultural, and informal working environment with ample possibilities to take initiative and show responsibility. We commit to supporting and guiding you in this process; not only with words but also with tangible actions. Through imec.academy, 'our corporate university', we actively invest in your development to further your technical and personal growth. 

We are aware that your valuable contribution makes imec a top player in its field. Your energy and commitment are therefore appreciated by means of a competitive salary with many fringe benefits. 

Who you are

  • Ph.D. in Physics/Chemistry/Materials Science/Chemical Engineering or equivalent.
  • Having any prior background in any of these areas such as plasma chemistry, ALD, plasma etch, organo-metallic chemistry, etc. is desirable
  • Rich experience with various material characterization technics such as SEM, XRR, XPS, TEM, etc. is preferred
  • Capable in working on your own or with little supervision, well organized, have a good attention to detail and value quality.
  • Given the international character of imec, excellent knowledge of (spoken and written) English is a must.

This postdoctoral position is funded by imec through KU Leuven. Because of the specific financing statute which targets international mobility for postdocs, only candidates who did not stay or work/study in Belgium for more than 24 months in the past 3 years can be considered for the position (short stays such as holiday, participation in conferences, etc. are not taken into account).