Literature related to Focused Ion Beam

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• Scanning Ion Beam Techniques for the Examination of Microelectronic Devices
  Cleaver J.R.A., E.C.G. Kirk, R.J. Young and H. Ahmed
  J. Vac. Sci. Technol. B 6, 1026 (1988).
  
• Focused Ion Beam Technology: A Bibliography
  R. A. D. Mackenzie et al
  Nanotechnology 1 163-201 (1990).
• Contrast Mechanisms in Focused Ion Beam Imaging
  Olson T.K., R.G. Lee, J.C. Morgan
  in : Proc. 18th International Symposium for Testing and Failure Analysis (ISTFA 92), p. 373 (1992).
  
• Applications of Focused Ion Beams in Microelectronics Production, Design and Development
  Stevie F.A., T.C. Shane, P.M. Kahora, R. Hull, D. Bahnck, V.C. Kannan, E. David
  Surf. Interface Anal. 23, 61 (1995)
  
• FIB for Failure Analysis
  Abramo M., R. Wasielewski
  Semicond. International, 133 (1997).
  
• The Use of the Focused Ion Beam in Failure Analysis
  Verkleij D.
  Microelectron. Reliab. 38, 869 (1998).
  
• Integrated Circuit Device Repair using FIB system : Tips, Tricks, and Strategies
  Hooghan K.N., K.S. Wills, P.A. Rodriguez, S. O'Connell
  in : Proc. 25th International Symposium for Testing and Failure Analysis (ISTFA 99), p. 247 (1999).
  
• Focused Ion Beam and Transmission Electron Microscopy for Process Development
  Bender H.
  in : Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, eds B.O. Kolbesen et al (Electrochemical Society, Pennington) Vol 99-16 p. 232 (1999).
  
• Application of the dual-beam FIB/SEM to metals research
  Sivel V.G.M. et al
  Journal of Microscopy 214, 237–245 (2004).
  
• Introduction to Focused Ion Beams - Instrumentation, Theory, Techniques and Practice
  Ed. L.A. Giannuzzi, F.A. Stevie,
  ISBN 0-387-23116-1, Springer (2005)
• Handbook of Charged Particle Optics, 2nd Edition
  Ed Jon Orloff
  Chapter 11, "Focused Ion Beam" by M. Utlaut
  ISBN 9781420045543, CRC Press (2008).

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