Literature related to Focused Ion Beam
Some literature highlights :
- Scanning Ion Beam Techniques for the Examination of Microelectronic Devices
Cleaver J.R.A., E.C.G. Kirk, R.J. Young and H. Ahmed
J. Vac. Sci. Technol. B 6, 1026 (1988).
- Focused Ion Beam Technology: A Bibliography
R. A. D. Mackenzie et al
Nanotechnology 1 163-201 (1990).
- Contrast Mechanisms in Focused Ion Beam Imaging
Olson T.K., R.G. Lee, J.C. Morgan
in : Proc. 18th International Symposium for Testing and Failure Analysis (ISTFA 92), p. 373 (1992).
- Applications of Focused Ion Beams in Microelectronics Production, Design and Development
Stevie F.A., T.C. Shane, P.M. Kahora, R. Hull, D. Bahnck, V.C. Kannan, E. David
Surf. Interface Anal. 23, 61 (1995)
- FIB for Failure Analysis
Abramo M., R. Wasielewski
Semicond. International, 133 (1997).
- The Use of the Focused Ion Beam in Failure Analysis
Verkleij D.
Microelectron. Reliab. 38, 869 (1998).
- Integrated Circuit Device Repair using FIB system : Tips, Tricks, and Strategies
Hooghan K.N., K.S. Wills, P.A. Rodriguez, S. O'Connell
in : Proc. 25th International Symposium for Testing and Failure Analysis (ISTFA 99), p. 247 (1999).
- Focused Ion Beam and Transmission Electron Microscopy for Process Development
Bender H.
in : Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, eds B.O. Kolbesen et al (Electrochemical Society, Pennington) Vol 99-16 p. 232 (1999).
- Application of the dual-beam FIB/SEM to metals research
Sivel V.G.M. et al
Journal of Microscopy 214, 237–245 (2004).
- Introduction to Focused Ion Beams - Instrumentation, Theory, Techniques and Practice
Ed. L.A. Giannuzzi, F.A. Stevie,
ISBN 0-387-23116-1, Springer (2005)
- Handbook of Charged Particle Optics, 2nd Edition
Ed Jon Orloff
Chapter 11, "Focused Ion Beam" by M. Utlaut
ISBN 9781420045543, CRC Press (2008).
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